Dynamic modeling method for air bearings in ultra-precision positioning stages
نویسندگان
چکیده
منابع مشابه
Dynamic Accuracy Design Method of Ultra-precision Machine Tool
Ultra‐precision machine tool is the most important physical tool to machining the workpiece with the frequency domain error requirement, in the design process of which the dynamic accuracy design (DAD) is indispensable and the related research is rarely available. In light of above reasons, a DAD method of ultra‐precision machine tool is proposed in this paper, which is based on the frequency d...
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ژورنال
عنوان ژورنال: Advances in Mechanical Engineering
سال: 2016
ISSN: 1687-8140,1687-8140
DOI: 10.1177/1687814016664290